RIE Etch Matrix
(
192KB : 2014-10-03
)
Processing System
(
4.5MB : 2004-09-27
)
Internal Acceptance Document - SiO2 etch
(
16KB : 2003-12-10
)
Internal Acceptance Document - SiO2 etch using PR mask
(
16KB : 2003-12-10
)
Field Acceptance Document
(
160KB : 2005-10-10
)
Gas Lines Ultimate Pressure
(
20KB : 2006-12-11
)
Control System
(
3.1MB : 2004-09-27
)
MKS Mini Vacuum Pressure Switch
(
168KB : 2005-05-16
)
Alcatel ATP900 Greasing Procedure
(
1.7MB : 2005-11-23
)
Alcatel ATP Users Manual
(
3.5MB : 2010-08-19
)
Julabo LH45
(
1.5MB : 2005-05-16
)
MWH-5 Automatic Matching Impedance Network
(
256KB : 2012-06-28
)
MODIFICATIONS FOR MWH-5
(
72KB : 2012-06-28
)
Trivac BCS Rotary Vane Vacuum Pump
(
556KB : 2005-05-20
)
Trivac Inert Gas System
(
1.1MB : 2017-03-30
)
ENI/MKS GMW-25 Plasma Generator
(
696KB : 2006-07-10
)
RS232 Serial Communication with ENI Generators
(
72KB : 2009-09-04
)
ENI/MKS AGC-3B Plasma Generator
(
328KB : 2009-09-04
)
ENI Generator Setup
(
56KB : 2006-10-27
)
ENI/MKS GMW-25 Plasma Generator Packing Instructions
(
292KB : 2006-07-10
)
ENI MWD-25LD-06/07 Automatic Matching Network
(
376KB : 2011-08-16
)
Unaxis mod to ENI MWD-25LD-06/07 Automatic Matching Network
(
1.3MB : 2011-08-16
)
CX-29-PN-J Retro-reflecting Photoelectric Sensor (with polarizing filter)
(
720KB : 2008-08-11
)
VAT Gate Valve
(
728KB : 2009-02-07
)
VAT Gate Valve
(
480KB : 2017-03-30
)
Schematic
(
1.2MB : 2012-12-14
)
Beckhoff DeviceNet Coupler
(
568KB : 2012-12-14
)
Laser end point camera manual
(
108KB : 2014-02-08
)
Laser end point camera setup brochure
(
176KB : 2014-02-08
)
CD/CM Series Capacitance Diaphragm Gauges
(
15.8MB : 2016-12-18
)
Service Documentation
(
6.4MB : 2017-02-28
)
Chemical Filter (for Leybold)
(
640KB : 2019-01-15
)