Operating Checklist
(
228KB : 2015-12-05
)
Manual
(
4.3MB : 2007-10-10
)
Deposition Materials Table
(
64KB : 2007-11-30
)
Crucible Liners Table
(
28KB : 2009-10-24
)
System diagram
(
360KB : 2007-11-09
)
Modification to vacuum system
(
48KB : 2010-07-17
)
Sigma SQC-300 Series Deposition Controller
(
1.5MB : 2007-10-06
)
MDC Evap-4000 E-beam Source
(
92KB : 2007-11-29
)
MDC Evap-4 Part numbers
(
412KB : 2008-08-18
)
Evap-4 filament change procedure
(
1.4MB : 2015-03-17
)
Evap emitter part numbers (Meivac)
(
132KB : 2015-03-17
)
MDC XY Sweeper
(
300KB : 2007-10-06
)
HVC E-Beam Power Supply
(
148KB : 2007-11-29
)
HVC E-Beam Trouble Shooting Guide
(
44KB : 2009-07-15
)
Pfeiffer TPG261 SingleGauge
(
2.1MB : 2009-05-24
)
Pfeiffer Full Range Gauge (short manual)
(
188KB : 2010-07-05
)
Pfeiffer Full Range Gauge (long manual)
(
556KB : 2023-09-28
)
Varian TV-551 Navigator Turbo Pump
(
3.1MB : 2007-11-30
)
ULVAC Mech Pump
(
528KB : 2007-10-18
)
Sigma Crucible Indexer
(
964KB : 2007-10-16
)
Temperature controller
(
384KB : 2007-10-16
)
Flow Switch
(
100KB : 2011-09-02
)
Omega Temperature Control/Display
(
744KB : 2010-07-22
)
KRI Ion Source
(
7.2MB : 2014-09-11
)
EH-200 assembly instructions
(
7.8MB : 2015-08-28
)
Ocean Optics HR-2000 Spectrometer
(
800KB : 2017-12-10
)
Ocean Optics HR-2000 Command Reference
(
668KB : 2017-12-07
)
Ocean Optics HL-2000 Halogen lamp
(
176KB : 2017-12-07
)
Ocean Optics Serial Adapter
(
92KB : 2018-12-13
)