Oxide deposition test runs
(
24KB : 2013-04-24
)
Nitride deposition test runs
(
32KB : 2013-04-24
)
Operating Checklist
(
260KB : 2015-04-06
)
Users Manual
(
3.0MB : 2000-08-23
)
790 Software Release Notes Version 71
(
748KB : 2007-09-13
)
PECVD Process Specifications
(
392KB : 2009-03-31
)
Field Acceptance Document
(
188KB : 2006-09-09
)
AEI RF Generator
(
3.7MB : 2007-01-02
)
AEI RF Generator Repair
(
300KB : 2007-05-04
)
Trivac D40BCS-PFPE Two-Stage Rotary Vane Pump
(
2.4MB : 2007-06-29
)
Trivac RUVAC WSU501 Roots Blower Pump
(
1.3MB : 2007-06-29
)
Neslab HX75 Heat Exchanger
(
868KB : 2007-09-19
)
MKS MFC
(
248KB : 2010-09-24
)
Oxide Recipes
(
48KB : 2007-05-15
)
Nitride Recipes
(
44KB : 2009-11-15
)
Service Documentation
(
132.8MB : 2023-06-18
)