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Semiconductor Device Fabrication Lab

Prof. Andrew Sarangan
University of Dayton
sarangan@udayton.edu
(937) 229-3190

Thin Films
Etching
Lithography
Substrate Prep
Thermal
Packaging
Metrology
Chemicals
- SC037
- SC253
Server Resources
Others
Projects
About the PI
Partners

Cleanroom Environment

• Logs
• Real time temperatures
• Documents