Semiconductor Device Fabrication Lab
Thin Films
RF/DC Sputter
E-beam Evaporation
PECVD
Etching
ICP/RIE
RIE/Ashing
Wet Etch
Lithography
Contact Mask Aligner
DUV Laser Interference Lithography
Spin Coater
Spray Developer
Photochemicals
Substrate Prep
Vapor Prime/Image Reversal
Megasonic Cleaner
UV Ozone Cleaner
Thermal
Diffusion/Oxidation Furnace
Rapid Thermal Processor
Contact Bake
Convection Oven
RT Hotplates
Muffle Furnace
Packaging
Wafer Bonder
Ball/Wedge Wire Bonder
Thinning/Polishing
Micro Fluidics
Metrology
Surface Profiler 1
AFM
SEM Library
Reflection/Transmission
Compound Optical Microscope
Horizontal Optical Microscope
Probe Station
4-Point Probe
Chemicals
Photoresists
Developers
Ancillary Photochemicals
Solvents
Acids
Wet Etchants
Gases
Solids
Sputter Targets
Other Chemicals
Server Resources
Internal cameras
Wiki
Essential lab skills
Photos
Software/drivers
Cr photomask files
Photoplot files
Other files
Others
Lifesize/Zoom
Cleanroom Environment
Loaned Items
He Leak Detector
Laser Particle Counter
DI Water Tester
Thermocouple Welder
Phone Numbers
Projects
Laser Interference Lithography
Silicon Nanowires (MACE)
Nanostructured Thin Films
Metal-Dielectric Thin Films
Fourier Multispectral Filters
Phase Change Materials (VO2)
Phase Change Materials (GST)
Silicon Infrared Photodetectors
Nano-Fab Education
About the PI
Partners
Optical Waveguide Sensors