Semiconductor Device Fabrication Lab

Photonics, Electronics, Optical Coatings

Prof. Andrew Sarangan
University of Dayton
sarangan@udayton.edu
(937) 229-3190

Wet Etch

Logs
Documents

A very large number of wet etch processes are used for etching metals and semiconductors, including temperature-controlled anisotropic silicon etches such as KOH and TMAH.