Semiconductor Device Fabrication Lab
Prof. Andrew Sarangan
University of Dayton
sarangan@udayton.edu
(937) 229-3190
Thin Films
RF/DC Sputter
E-beam Evaporation
PECVD
Etching
ICP/RIE
RIE/Ashing
Wet Etch
Lithography
Contact Mask Aligner
Laser Beam Lithography
DUV Laser Interference Lithography
Spin Coater
Spray Developer
Photochemicals
Substrate Prep
Vapor Prime/Image Reversal
Megasonic Cleaner
UV Ozone Cleaner
Thermal
Diffusion/Oxidation Furnace
Rapid Thermal Processor
Contact Bake
Convection Oven
Hotplates
Muffle Furnace
Packaging
Wafer Bonder
Ball/Wedge Wire Bonder
Thinning/Polishing
Micro Fluidics
Metrology
Surface Profiler 1
Surface Profiler 2
AFM
SEM Library
Reflection/Transmission
Compound Optical Microscope
Horizontal Optical Microscope
Probe Station
4-Point Probe
Chemicals
Photoresists
Developers
Ancillary Photochemicals
Solvents
Acids
Wet Etchants
Gases
Solids
Sputter Targets
Other Chemicals
Server Resources
Internal cameras
Wiki
Essential lab skills
Photos
Software/drivers
Cr photomask files
Photoplot files
Other files
Others
Lifesize/Zoom
Cleanroom Environment
3D Printer
Loaned Items
He Leak Detector
Laser Particle Counter
DI Water Tester
Thermocouple Welder
Phone Numbers
OASIS Workshop Signup
Projects
Laser Interference Lithography
Silicon Nanowires (MACE)
Nanostructured Thin Films
Metal-Dielectric Thin Films
Fourier Multispectral Filters
Phase Change Materials (VO2)
Phase Change Materials (GST)
Silicon Infrared Photodetectors
Nano-Fab Education
About the PI
Partners
Megasonic Cleaner
•
Documents
