The magetron sputter deposition system contains three cathodes which can be configured for RF or DC excitation. The process gases are: argon, oxygen and nitrogen.
Prof. Andrew Sarangan
University of Dayton
sarangan@udayton.edu
(937) 229-3190
The magetron sputter deposition system contains three cathodes which can be configured for RF or DC excitation. The process gases are: argon, oxygen and nitrogen.