Semiconductor Device Fabrication Lab

Photonics, Electronics, Optical Coatings

Prof. Andrew Sarangan
University of Dayton
(937) 229-3190

Suss MA6/BA6

This mask aligner can produce various types of contact exposures using a 1000 watt mercury vapor lamp at 365nm wavelength, with minimum features down to 500nm. Backside alignment as well as substrate-to-substrate bond alignment can also be performed.