Semiconductor Device Fabrication Lab

Photonics, Electronics, Optical Coatings

Prof. Andrew Sarangan
University of Dayton
(937) 229-3190

Torr E-beam Evaporator

The e-beam evaporator uses a 10kV DC source (max 6kW) four rotatable pockets, and cryogenic substrate cooling down to 100K. It has also been fitted with an ion-assisted deposition (IAD) source with argon and oxygen, as well as a custom-built optical monitoring spectrometer for real-time monitoring.