Semiconductor Device Fabrication Lab

Photonics, Electronics, Optical Coatings

Prof. Andrew Sarangan
University of Dayton
(937) 229-3190

DUV Laser Interference Lithography

This is a custom-built laser interference lithography system using a deep-UV (266nm) diode-pumped laser. Using a Lloyd’s mirror configuration, one-dimensional and two-dimensional periodic structures as small a 100nm are made on large substrates.