![](https://nano-fab.com/wp-content/uploads/sites/7/2018/05/duv-e1525472865398.jpg)
• Logs
• Maintenance
• Documents
This is a custom-built laser interference lithography system using a deep-UV (266nm) diode-pumped laser. Using a Lloyd’s mirror configuration, one-dimensional and two-dimensional periodic structures as small a 100nm are made on large substrates.