Semiconductor Device Fabrication Lab

Photonics, Electronics, Optical Coatings

Prof. Andrew Sarangan
University of Dayton
(937) 229-3190

Ambios XP-1

This is a stylus profiler that can take line scans of thin films and measure their thicknesses down to about 20 Angstroms of accuracy. Film stress can also be measured by taking pre- and post deposition scans.