This 6″ hot plate can float the wafer on nitrogen or perform vacuum contact during baking. Temperature can be ramped up or down at programmed levels.
Photonics, Electronics, Optical Coatings
Prof. Andrew Sarangan
University of Dayton
sarangan@udayton.edu
(937) 229-3190
This 6″ hot plate can float the wafer on nitrogen or perform vacuum contact during baking. Temperature can be ramped up or down at programmed levels.