Compared to plasma cleaning, ozone can be more effective in some cases to remove some organic contaminants without any ion damage. This ozone cleaner uses a 254nm mercury lamp to generate ozone.
Photonics, Electronics, Optical Coatings
Prof. Andrew Sarangan
University of Dayton
sarangan@udayton.edu
(937) 229-3190
Compared to plasma cleaning, ozone can be more effective in some cases to remove some organic contaminants without any ion damage. This ozone cleaner uses a 254nm mercury lamp to generate ozone.